Power lateral diffused MOS transistor
AssigneeUnited Microelectronics Corp.
InventorMing-Te Lin
Life of this patent
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Abstract
The present invention provides a power lateral diffused metal-oxide semiconductor (power LD MOS) transistor positioned in an active area of a substrate on a semiconductor wafer. The power LD MOS transistor has a source/drain, a first metal layer and a hexagonal-shaped gate. The first metal layer is positioned on a second dielectric layer, covering the first dielectric layer, the gate, and the surface of the substrate, and is electrically connected with the drain via a first plug. A hexagonal-shaped gate positioned on the substrate surrounds the drain, with a first end of the gate positioned on the first dielectric layer and a second end connecting with the source. A second metal layer positioned on the second dielectric layer electrically connects with the drain via a second plug.
Claims5
A lateral diffused metal-oxide semiconductor (MOS) transistor, the MOS transistor positioned in an active area of a substrate on a semiconductor wafer, the MOS transistor comprising:
- at least two doped regions positioned in the substrate, a first doped region and a second doped region, respectively, the first doped region functioning as a source of the MOS transistor, and the second doped region functioning as a drain of the MOS transistor;
- a first dielectric layer positioned outside the active area of the substrate;
- a hexagonal-shaped gate positioned on the substrate and surrounding the second doped region, with a first end of the gate positioned on the first dielectric layer and a second end connecting with the first doped region;
- a second dielectric layer covering the first dielectric layer, the gate, and the surface of the substrate;
- a first plug positioned in the second dielectric layer, and electrically connecting with the first doped region in the substrate;
- a first metal layer positioned on the second dielectric layer, corresponding to a position bordering the hexagonal-shaped gate, and electrically connecting with the first doped region via the first plug;
- a third dielectric layer covering both the second dielectric layer and the first metal layer;
- a second plug positioned through the third dielectric layer and the second dielectric layer, and electrically connecting with the second doped region in the substrate;
- and
- a second metal layer positioned on the third dielectric layer, and electrically connecting with the second doped region via the second plug.
A lateral diffused metal-oxide semiconductor (MOS) transistor, the MOS transistor positioned in an active area of a substrate on a semiconductor wafer, the MOS transistor comprising:
- at least two doped regions positioned in the substrate, a first doped region and a second doped region, respectively, the first doped region functioning as a source of the MOS transistor, and the second doped region functioning as a drain of the MOS transistor;
- a first dielectric layer positioned outside the active area of the substrate;
- a hexagonal-shaped gate positioned on the substrate and surrounding the second doped region, with a first end of the gate positioned on the first dielectric layer, and a second end connecting with the first doped region;
- a second dielectric layer covering the first dielectric layer, the gate, and the surface of the substrate;
- a plurality of first plugs positioned in the second dielectric layer, and electrically connecting with the first doped region in the substrate;
- a second plug positioned in the second dielectric layer, and electrically connecting with the second doped region in the substrate;
- a first metal layer positioned on the second dielectric layer, corresponding to a position bordering the hexagonal-shaped gate, and electrically connecting with the first doped region via the first plugs;
- a third dielectric layer covering both the second dielectric layer and first metal layer;
- a third plug positioned in the third dielectric layer, and electrically connecting with the second doped region via the second plug;
- and
- a second metal layer positioned on the third dielectric layer, and electrically connecting with the second doped region via the second plug.
Dependencies are inferred from the claim text.