Gate-insulating film including oxide film
AssigneeNEC Corporation
InventorEiji Hasegawa
Life of this patent
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Abstract
A gate-insulating film of the present invention is a gate-insulating film having a polycrystalline film made of a metal oxide, in which a grain boundary plane extending in parallel with the polycrystalline film is present at the position of a predetermined thickness of the polycrystalline film and grain boundaries extending in the film-thickness direction of polycrystals configuring the polycrystalline film are discontinuous at the grain boundary plane.
Claims6
A gate-insulating film having a polycrystalline film made of a metal oxide, wherein a grain boundary plane extending in parallel with a plane of said polycrystalline film is present at a position of a predetermined thickness of said polycrystalline film and grain boundaries extending in film-thickness directions of polycrystals configuring said polycrystalline film are discontinuous on said grain boundary plane.
A gate-insulating film including a silicon oxide film formed on a silicon substrate and a polycrystalline film made of an oxide formed on said silicon oxide film,
- wherein said polycrystalline film has a laminate structure of polycrystalline layers polycrystallized after a plurality of amorphous layers made of said oxide are superposed and grain boundaries extending in said layer-thickness direction of said polycrystalline layers adjacent to each other in said layer-thickness direction are discontinuous with each other,
- wherein said oxide is a tantalum oxide having a relative permittivity of 7.0 or more and said gate-insulating film has a thickness converted into silicon-oxide-film thickness of 5.0 nm or less.
A gate-insulating film including a polycrystalline film made of an oxide,
- wherein said polycrystalline film has a laminate structure of polycrystalline layers polycrystallized after a plurality of amorphous layers made of said oxide are independently superposed and grain boundaries extending in said layer-thickness direction of said polycrystalline layers adjacent to each other in said layer-thickness direction are discontinuous with each other,
- wherein said oxide is a tantalum oxide.
A gate-insulating film including a polycrystalline film made of an oxide,
- wherein said polycrystalline film has a layer-thickness-directional grain size equal to an average grain size in a direction parallel with a layer and has a structure in which a plurality of polycrystalline layers whose thickness is equal to said layer-thickness-directional grain size, and grain boundaries extending in said layer-thickness direction of said polycrystalline layers adjacent to each other in said layer-thickness direction are discontinuous with each other,
- wherein said oxide is a tantalum oxide.
A gate-insulating film including a silicon oxide film formed on a silicon substrate and a polycrystalline film made of an oxide formed on said silicon oxide film,
- wherein said polycrystalline film has a laminate structure of polycrystalline layers polycrystallized after a plurality of amorphous layers made of said oxide are superposed and grain boundaries extending in said layer-thickness direction of said polycrystalline layers adjacent to each other in said layer-thickness direction are discontinuous with each other,
- wherein said oxide is a tantalum oxide.
Dependencies are inferred from the claim text.