Microelectronic and microelectromechanical devices comprising carbon nanotube components, and methods of making same
AssigneeAdvanced Technology Materials, Inc.
InventorsGeorge R. Brandes, Xueping Xu
Life of this patent
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Abstract
A microelectronic or microelectromechanical device, including a substrate and a carbon microfiber formed thereon, which may be employed as an electrical connector for the device or as a selectively translational component of a microelectromechanical (MEMS) device.
Claims55
A microelectronic or microelectromechanical device, comprising:
- a substrate, wherein the substrate includes an oxide layer and an etch stop layer for the oxide layer;
- and
- a fiber formed of a carbon-containing material.
A method of forming a carbon-containing fiber on a substrate, as a component of a microelectronic or microelectromechanical device, comprising the steps of:
- growing at least one carbon-containing fiber catalytically on a surface of the substrate by heating the substrate in the presence of a carbon source to a temperature sufficient to grow the fiber on the substrate surface, wherein the carbon-containing fiber is intersectingly grown from two different regions of the substrate, whereby intersection of respective growths forms the carbon-containing fiber.
A method of forming a carbon-containing fiber on a substrate, wherein the carbon-containing fiber is a component of a microelectronic or microelectromechanical device, comprising the step of:
- growing at least one carbon-containing fiber catalytically on a surface of the substrate by heating the substrate in the presence of a carbon source to a temperature sufficient to grow the fiber on the substrate surface, wherein the substrate includes an oxide layer and an etch stop layer for the oxide layer.
A method of forming a carbon-containing fiber on a substrate, wherein the carbon-containing fiber is a component of a microelectronic or microelectromechanical device, comprising the step of:
- growing at least one carbon-containing fiber catalytically on a surface of the substrate by heating the substrate in the presence of a carbon source to a temperature sufficient to grow the fiber on the substrate surface, wherein the substrate includes an oxide layer and an etch stop layer for the oxide layer.
A method of forming a carbon-containing fiber on a substrate, wherein the carbon-containing fiber is a component of a microelectronic or microelectromechanical device, comprising the step of:
- growing at least one carbon-containing fiber catalytically on a surface of the substrate by heating the substrate in the presence of a carbon source to a temperature sufficient to grow the fiber on the substrate surface, wherein the carbon-containing fiber is intersectingly grown from two different regions of the substrate, whereby intersection of respective growths forms the carbon-containing fiber.
A method of forming microelectronic or microelectromechanical device components that comprise carbon-containing fibers, comprising the step of:
- growing at least one carbon-containing fiber catalytically on a surface by heating the surface in the presence of a carbon source to a temperature sufficient to grow the fiber on the surface, wherein impurities are introduced during carbon microfiber growth.
Dependencies are inferred from the claim text.