Apparatus for production and extraction of charged particles
AssigneeShimazdu Research Laboratory (Europe) Ltd.
InventorsEizo Kawato, Alan Joseph Smith, Koichi Tanaka
Life of this patent
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Abstract
The apparatus comprises a sample, an optical element (4) in the form of a truncated pyramid having at least one reflective surface (1a) and a hole (7). A laser (18) directs radiation on to the sample via the reflective surface (1a) and the charged particles are extracted and directed along an extraction axis through the hole (7).
Claims29
An apparatus for the production and extraction of charged particles comprising a sample substrate upon which a sample is deposited, an optical element having at least one reflective surface and having at least one hole extending through the optical element, irradiation means for directing radiation onto a surface of the sample via said at least one reflective surface to stimulate emission of charged particles and extraction means for extracting at least some of the charged particles and directing the extracted charged particles away from said surface along an extraction axis so that said charged particles pass from said sample through said hole in the optical element, wherein the optical element has at least one side surface inclined towards the sample, the or each side surface is disposed downstream of an opening to said at least one hole with respect to the direction of extraction of the charged particles, and said at least one reflective surface is provided on a said side surface.
Dependencies are inferred from the claim text.