Fine and micro-machining process for workpieces by means of laser beams
AssigneeDaimlerChrysler AG
InventorsAxel Giering, Peter Linden, Markus Beck, Jochen Bahnmüller
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Abstract
A process and device are disclosed for fine and micro-machining workpieces by means of laser beams. The process is conducted in several stages and the device has a modular design. The process and device make it possible to generate highly uniform cut seams or grooves, to set the required conicity, to work in a highly accurate and reproducible manner and give a great freedom of design during machining.
Claims20
A device for fine and micro-machining of workpieces by means of laser beams, which includes a device for focusing of laser beams, which contains multiple modules, which modules include
- a module for rotation of the laser beam about its beam axis,
- a module for varying the impact point of the laser beam upon the workpiece, and containing one or more mirrors as well as a device associated with each mirror for rotation of the mirror about at least two independent rotation axes, and
- a module which contains a device for variation of the incident angle of the laser beam relative to the surface of the workpiece.
A device for fine and micro-machining of workpieces by means of laser beams, which includes a device for focusing of laser beams, which contains multiple modules, which modules include
- a module for rotation of the laser beam about its beam axis,
- a module for varying the impact point of the laser beam upon the workpiece, and
- a module which contains a device for variation of the incident angle of the laser beam relative to the surface of the workpiece.
A process for fine and micro-machining of workpieces by means of laser beams, comprising
- generating a laser beam,
- focusing the laser beam,
- striking the workpiece with said focused laser beam,
- wherein the laser beam prior to striking the workpiece is directed through first, second and third modules,
- wherein in the first module the laser beam is rotated about a beam axis,
- wherein in the second module the point of impact of the laser beam on the workpiece is varied, and
- wherein in the third module the impact angle of the laser beam relative to the surface of the workpiece is varied.
Dependencies are inferred from the claim text.