High speed track shutter system for semi-conductor inspection
AssigneeElectro Scientific Industries, Inc.
InventorChris DeGraw
Life of this patent
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Abstract
The present invention provides a shutter system for use with an automated semiconductor chip handling device. The semiconductor chip handling device includes a track down which semiconductor chips travel. Reliefs are positioned on the track to prevent the semiconductor chips from escaping. A gap in the relief provides access to the semiconductor chips so that they may be removed from the track. A pair of shutters pivot between a first position where they cover the gap and a second position where the gap is uncovered so that chips may be removed from the gap without chips escaping from the track during normal operation.
Claims8
An automated semiconductor handling device including an inspection station operative to inspect a plurality of semiconductor chips and an inclined track down which the semiconductor chips travel, the semiconductor handling device operative in removing semiconductor chips rejected at the inspection station, and delivering acceptable semiconductor chips to a storage medium, the automated semiconductor handling device comprising:
- at least one elongated rail positioned substantially continuously along the inclined track, wherein the semiconductor chips are positioned beneath the rail to prevent the semiconductor chips from disengaging from the inclined track, the rail including at least one gap in the rail where the semiconductor chips are not substantially underneath the rail wherein the semiconductor chips are not prevented from disengaging from the track;
- at least one shutter positioned to selectively cover the gap in the rail such that when the shutter is covering the gap, the shutter is co-linear with the rail and the shutter prevents the semiconductor chips from disengaging from the track, and when the shutter is not covering the gap the automated semiconductor handling device may remove semiconductor chips from the track.
An automated semiconductor handling system where the automated semiconductor handling system includes a track on which semiconductor chips travel with the assistance of compressed air, the automated semiconductor handling system comprising:
- a pair of elongated rails, the semiconductor chips positioned under the rail to prevent the semiconductor chips from disengaging from the track, each rail having a gap where the semiconductor chips are not substantially under the rail wherein semiconductor chips may disengage from the track;
- a pair of shutters pivotally mounted on the semiconductor handling device, each shutter being proximate to one of the gaps, the shutters pivotally movable between a first position where the shutters cover one of the gaps with the shutter-being co-linear with one of the rails and a second position where the shutters do not cover the gap, and;
- means for moving the shutters between their first and second positions.
Dependencies are inferred from the claim text.