US 6,444,539 B1 · Method for producing a shallow trench isolation filled with thermal oxide

Abstract

A semiconductor apparatus and method for producing shallow trench isolation. The method includes the steps providing a semiconductor substrate member fabricated having a thin barrier oxide layer on which are fabricated a plurality of spaced apart silicon nitride pads. The regions between the spaced apart nitride pads delineate U-shaped regions for forming shallow isolation trenches and are layered with silicon oxide and polysilicon. The U-shaped regions provide a buffer region of oxide and polysilicon material adjacent opposing silicon nitride pads that prevent erosion of the nitride during etch formation of the isolation trench. The polysilicon is further etched to form a wider, second U-shaped region having sloped sidewalls that provide opposing spacer-forming buffer material that facilitates forming a V-shaped isolation trench region into the semiconductor substrate member a predetermined depth without eroding the silicon nitride pads. The V-shaped trench is subsequently filled with silicon dioxide that is grown by a hot thermal oxide process. The upper portion of the V-shaped isolation trench may be further filled with deposited silicon dioxide followed by a chemical mechanical polishing process.

Claims15

Dependent claims

A method for producing at least one shallow trench isolation, said method comprising the steps of:

(a) providing a semiconductor substrate member having a barrier oxide layer;
(b) forming at least one pair of spaced apart first dielectric pads on said barrier oxide layer;
(c) forming a silicon layer over said first dielectric pads and over said barrier oxide layer in regions between said first dielectric pads, said regions between said first dielectric pads comprising regions for forming said at least one shallow trench isolation;
(d) forming a polysilicon layer over said silicon layer, said polysilicon layer forming a first U-shaped notch in said region delineated for forming said at least one shallow trench isolation and providing a first buffer region comprising an oxide and a polysilicon material adjacent said at least one pair of spaced apart first dielectric pads;
(e) forming, by a polysilicon etching process, a wider, second U-shaped notch in said region delineated for forming said at least one shallow trench isolation, said second U-shaped notch having sloped sidewalls that form a second buffer region comprising tapering amounts of an oxide and a polysilicon material;
and
(f) forming a V-shaped isolation trench region into said semiconductor substrate member, said V-shaped isolation trench region being formed by etching the polysilicon material comprising sidewalls of said second U-shaped notch, by etching through said barrier oxide and into said semiconductor substrate member a predetermined depth.

4 more elements

A method for producing at least one shallow trench isolation, said method comprising the steps of:

(a) providing a semiconductor substrate member having a barrier oxide layer;
(b) forming at least one pair of spaced apart first dielectric pads on said barrier oxide layer;
(c) forming a silicon layer over said first dielectric pads and over said barrier oxide layer in regions between said first dielectric pads, said regions said first dielectric pads comprising regions for forming said at least one shallow trench isolation;
(d) forming a polysilicon layer over said silicon layer, said polysilicon layer forming a first U-shaped notch in said region delineated for forming said at least one shallow trench isolation and providing a first buffer region comprising an oxide and a polysilicon material adjacent said at least one pair of spaced apart first dielectric pads;
(e) forming, by a polysilicon etching process, a wider, second U-shaped notch in said region delineated for forming said at least one shallow trench isolation, said second U-shaped notch having sloped sidewalls that form a second buffer region comprising tapering amounts of an oxide and a polysilicon material;
(f) forming a V-shaped isolation trench region into said semiconductor substrate member, said V-shaped isolation trench region being formed by etching the polysilicon material comprising sidewalls of said second U-shaped notch, by etching through said barrier oxide and into said semiconductor substrate member a predetermined depth;
and
(g) growing a trench isolation material comprising a first thermal oxide being grown within a substantial portion of said V-shaped isolation trench region.

5 more elements

A method for producing at least one shallow trench isolation, said method comprising the steps of:

(a) providing a semiconductor substrate member having a barrier oxide layer;
(b) forming at least one pair of spaced apart first dielectric pads on said barrier oxide layer;
(c) forming a silicon layer over said first dielectric pads and over said barrier oxide layer in regions between said first dielectric pads, said regions between said first dielectric pads comprising regions for forming said at least one shallow trench isolation;
(d) forming a polysilicon layer over said silicon layer, said polysilicon layer forming a first U-shaped notch in said region delineated for forming said at least one shallow trench isolation and providing a first buffer region comprising an oxide and a polysilicon material adjacent said at least one pair of spaced apart first dielectric pads;
(e) forming, by a polysilicon etching process, a wider, second U-shaped notch in said region delineated for forming said at least one shallow trench isolation, said second U-shaped notch having sloped sidewalls that form a second buffer region comprising tapering amounts of an oxide and a polysilicon material;
(f) forming a V-shaped isolation trench region into said semiconductor substrate member, said V-shaped isolation trench region being formed by etching the polysilicon material comprising sidewalls of said second U-shaped notch, by etching through said barrier oxide and into said semiconductor substrate member a predetermined depth;
(g) growing a trench isolation material comprising a first thermal oxide material being grown within a substantial portion of said V-shaped isolation trench region;
and
(h) depositing, by chemical vapor deposition process, a second thermal oxide material at an upper end portion of said V-shaped isolation trench region,
wherein said at least one pair of spaced apart first dielectric pads comprises silicon nitride (Si3N4),
wherein said barrier oxide layer comprises silicon dioxide (SiO2),
wherein said first thermal oxide comprises silicon dioxide (SiO2),
wherein said second thermal oxide comprises silicon dioxide (SiO2), and
wherein said at least one shallow trench isolation comprises a V-shape having at least one rounded top corner and at least one sharp bottom corner.

11 more elements

Dependencies are inferred from the claim text.

Method for producing a shallow trench isolation filled with thermal oxide

Life of this patent

Method for producing a shallow trench isolation filled with thermal oxide

Life of this patent

Abstract

Claims15