Method of forming conductive layers in the trenches or through holes made in an insulating film on a semiconductors substrate

A method of manufacturing a semiconductor integrated circuit device, comprising the steps of:

• a) forming a first conductive film on a surface of a semiconductor substrate, forming a first insulating film on the first conductive film and then making a through hole in the first insulating film;
• b) forming a photoresist film in the through hole and on the first insulating film, and then exposing to light a part of the photoresist film which lies in the through hole and a part of the part of the photoresist film which lies on a wire-forming region;
• c) removing the part of the photoresist film which has been exposed to light, thereby leaving the unexposed parts of the photoresist film which lie on a part of the first insulating film and in the through hole;
• d) etching the first insulating film by using the unexposed part of the photoresist film as a mask, thereby making a wire trench in the first insulating film;
• e) removing the unexposed part of the photoresist film and forming a second conductive film, on the first insulating film and in the wire trench and through hole, said second conductive film lying in the through hole and electrically connected to the first conductive film via the through hole;
• and
• f) removing the part of the second conductive film which lies on the first insulating film by means of chemical and mechanical polishing, thereby forming a buried wire made of the second conductive film in the wire trench and through hole.