Thermosetting anti-reflective coatings for full-fill dual damascene process
AssigneeBrewer Science Inc.
InventorsSatoshi Takei, Yasuhisa Sone, Ken-Ichi Mizusawa
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Abstract
New polymers and anti-reflective or fill compositions including those polymers are provided. The polymer comprises recurring monomers according to the formula wherein R comprises a light attenuating compound. The inventive compositions can be used to protect contact or via holes from degradation during subsequent etching in the dual damascene process.
Claims53
A polymer comprising recurring monomers according to the formula
- wherein R comprises a light attenuating compound.
In an anti-reflective or fill composition for protecting a base material or holes formed in a base material, the composition including a polymer dissolved in a solvent system, the improvement which comprises said polymer comprising recurring monomers of the formula
- wherein R comprises a light attenuating compound.
The combination of a substrate having a surface and a cured protective layer on said substrate surface, said cured protective layer being formed from a composition comprising a polymer comprising recurring monomers of the formula
- wherein R comprises a light attenuating compound.
Dependencies are inferred from the claim text.