Method for remote plasma deposition of fluoropolymer films
AssigneeXerox Corporation
InventorsDaniel E. Kuhman, Christopher Constantine, Kevin N. Beatty
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Abstract
A thermal ink jet printhead contains, on a front face, a remote plasma deposited fluoropolymer film. The fluoropolymer film has a high fluorine to carbon ratio. The film also possesses excellent mechanical durability. The film may be prepared by forming a remote plasma from precursor gases containing flurocarbons and depositing from the remote plasma onto a front face of a thermal ink jet printhead
Claims12
A method for remote plasma deposition of a fluoropolymer film on an ink jet printhead that is to have ink supplied to it and contains on array of nozzles terminating on a front face, the front face of the ink jet print head having a first layer composed predominately of diamond-like carbon, comprising:
- dissociating fluorocarbon precursor gas or gases to form a remote plasma containing dissociated fluorocarbon species;
- transporting said species to the front face of the ink jet printhead via diffusion;
- and
- depositing said species onto the first layer of the ink jet printhead to form an ink repellent layer composed predominately of a fluoropolymer and in which at least 25% of fluorine on the surface of the ink repellent layer is in the form of a combination of CF2 and CF3 bonds, thereby forming a two layer plasma deposited film structure to achieve the ink repellent function so that at least the portion of the front face in the vicinity of the repels said ink.
A method for remote plasma deposition of a fluoropolymer film on an ink jet printhead that is to have ink supplied to it and contains on array of nozzles terminating on a front face, the front face of the ink jet print head having a first layer composed predominately of diamond-like carbon, comprising:
- forming a remote plasma;
- transporting reactive species of said plasma by diffusion to fluorocarbon precursor gas or gases in order to dissociate said fluorocarbon gas or gases;
- and
- depositing said dissociated fluorocarbon gas or gases onto the first layer of the ink jet printhead to form an ink repellent layer composed predominately of a fluoropolymer and in which at least 25% of fluorine on the surface of the ink repellent layer is in the form of a combination of CF2 and CF3 bonds, thereby forming a two layer plasma deposited film structure to achieve the ink repellent function so that at least the portion of the front face in the vicinity of the nozzles repels said ink.
Dependencies are inferred from the claim text.