Formation of nanometer-size wires using infiltration into latent nuclear tracks
AssigneeThe Regents of the University of California
InventorsRonald G. Musket, Thomas E. Felter
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Abstract
Nanometer-size wires having a cross-sectional dimension of less than 8 nm with controllable lengths and diameters are produced by infiltrating latent nuclear or ion tracks formed in trackable materials with atomic species. The trackable materials and atomic species are essentially insoluble in each other, thus the wires are formed by thermally driven, self-assembly of the atomic species during annealing, or re-crystallization, of the damage in the latent tracks. Unlike conventional ion track lithography, the inventive method does not require etching of the latent tracks.
Claims45
A method for preparing a nanometer-size wire having a high length-to diameter aspect ratio, said method comprising:
- forming a latent track in a trackable material;
- and
- infiltrating said latent track with atomic species having essentially no mutual solubility with said trackable material without prior etching of said track to form a nanometer-size wire comprising said atomic species within said latent track.
A method for preparing a nanometer-size wire having a controlled length-to diameter aspect ratio, said method comprising:
- forming a latent track in a trackable material to produce a tracked material;
- partially annealing said tracked material;
- and
- infiltrating said latent track with an atomic species having essentially no mutual solubility with said tracked material without prior etching of said track to form a nanometer-size wire comprising said atomic species within said latent track.
A method for preparing a nanofilament comprising a conducting material having a diameter less than 8 nanometers, said method comprising
- producing a latent nuclear track in a trackable material;
- infiltrating said latent nuclear track with said conducting material without prior etching of said latent nuclear track to form said nanofilament.
A method for preparing a nanofilament comprising a material having a diameter less than 8 nanometers, said method consisting essentially of:
- producing a latent track in a trackable material;
- partially annealing said tracked material;
- and
- infiltrating said latent track with said conducting material to form said nanofilament.
Dependencies are inferred from the claim text.