Apparatus and method for removing a bonded lid from a substrate
AssigneeInternational Business Machines Corporation
InventorsBarrie C. Campbell, David L. Edwards, Ronald L. Hering, Richard F. Shortt
Life of this patent
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Abstract
An apparatus and a method for removing a bonded lid from a substrate of variable size including nesting jaws to support and secure the substrate; and gripping jaws to grip the lid; wherein, in operation, the gripping jaws pivot with respect to the nesting jaws and create a, peeling action which separates the lid from the substrate with minimum force and without damage to the substrate or attached semiconductor devices.
Claims29
Apparatus for separating a bonded lid from a substrate, comprising;
- a first set of jaws for holding the substrate;
- a second set of jaws for gripping a lid bonded to the substrate, said second set of jaws for gripping comprising a movable slide jaw and a pivotable jaw, said pivotable jaw having a protruding lip ending in a sharp edge which is so positioned as to engage a corner of the lid;
- and
- means for pivoting said second set of jaws with respect to said first set of jaws so as to separate the lid from the substrate.
Apparatus for separating a bonded lid from a substrate, comprising;
- a first set of jaws for holding the substrate;
- means for gripping the lid, said means for gripping the lid comprising a jaw actuator member and a second set of jaws, the jaw actuator member forcing the second set of jaws to engage the lid, said second set of jaws comprising a movable slide jaw and a pivotable jaw, said pivotable jaw having a protruding lip ending in a sharp edge which is so positioned as to engage a corner of the lid;
- and
- means for pivoting the means for gripping the lid.
A method of separating a bonded lid from a substrate comprising the steps of:
- providing an apparatus comprising a first set of jaws for holding the substrate and a second set of jaws for gripping a lid bonded to the substrate, said second set of jaws for gripping comprising a movable slide jaw having a protruding lip ending in a sharp edge and a pivotable jaw having a protruding lip ending in a sharp edge;
- placing the substrate with the bonded lid in said apparatus;
- and
- pivoting said second set of jaws with respect to said first set of jaws so as to separate the lid from the substrate.
Dependencies are inferred from the claim text.