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US 6,444,041 B2Granted
Methods, complexes, and system for forming metal-containing films
AssigneeMicron Technology, Inc.
InventorBrian A. Vaartstra
Life of this patent
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Abstract
A method of forming a film on a substrate using Group III metal complexes. The complexes and methods are particularly suitable for the preparation of semiconductor structures using chemical vapor deposition techniques and systems.
Claims30
A chemical vapor deposition system comprising:
- a deposition chamber having a substrate positioned therein;
- a vessel containing a precursor comprising one or more complexes of the formula:
- M{[(C(R1)2)n]xN(R2)3−x}(R3)y(R4)z (Formula I)
- wherein:
- M is a Group III metal;
- each R1, R2, R3, and R4 group is independently H or an organic group;
- x=1 to3;
- n=1 to 6;
- y 1 when x=1 and y=3−x when x=2 or 3;
- and
- z=3−x−y;
- and
- a source of an inert carrier gas for transferring the precursor to the chemical vapor deposition chamber.
10 more elements
A chemical vapor deposition system comprising:
- a deposition chamber having a substrate positioned therein;
- a vessel containing a precursor comprising one or more complexes of the formula:
- M{[(C(R1)2)n]N(R2)2 }(R3)(R4)
- wherein:
- M is a Group m metal;
- each R1, R2, R3, and R4 group is independently H or a (C1-C30)hydrocarbon group wherein optionally R3 and R4 are joined to form a ring or rings with the metal and none of the other R groups are joined together to form ring systems;
- and
- n=1 to 6.
5 more elements
A chemical vapor deposition system comprising:
- a deposition chamber having a substrate positioned therein;
- a vessel containing a precursor comprising one or more hydride complexes of the formula:
- M {[(C(R1)2)n]N(R2)2}(R3)(R4)
- wherein:
- M is a Group ITI metal;
- each R1, R2, R3, and R4 group is independently H or a (C1-C30) hydrocarbon group, with the proviso that at least one of R3 and R4 is H and none of the R groups are joined together to form ring systems;
- and
- n=1 to 6.
5 more elements
Dependencies are inferred from the claim text.