Purification of methylsilanes
AssigneeThe BOC Group, Inc.
InventorsPatrick J. Helly, Masud Akhtar
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Abstract
A process for purifying methylsilane is described. Methylsilane containing impurities such as carbon dioxide, chlorosilane and atmospheric gases is fed from a source container unit to an adsorption unit at −40° C. The adsorption unit is connected to a collection unit at −190° C. where the purified methylsilane is transported and can be stored.
Claims14
A process for removing impurities from methylsilane comprising the steps of providing a source of methylsilane containing impurities;
- adding said methylsilane to an adsorption unit;
- and collecting the purified methylsilane in a collection unit.
The process as claimed in clam 1 wherein said source of methylsilane and said adsorption unit are at a temperature of −40° C.
The process as claimed in clam 1 wherein said collection unit is at a temperature of about −170° C. to −190° C.
The process as claimed in clam 1 wherein said source of methylsilane is a cylinder.
The process as claimed in clam 1 wherein said collection unit is a cylinder.
A process for the purification of methylsilane comprising adding methylsilane containing impurities to an adsorption unit containing an adsorbent.
Dependencies are inferred from the claim text.