Process and system for separation and recovery of perfluorocompound gases
AssigneeAmerican Air Liqide, Inc.
InventorsYao-En Li, Jospeh E. Paganessi, David Vassallo, Gregory K. Fleming
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AssigneeAmerican Air Liqide, Inc.
InventorsYao-En Li, Jospeh E. Paganessi, David Vassallo, Gregory K. Fleming
Estimating the term…
Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least once glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.
A process for the separation and recovery of at least one perfluorocompound gas from a gas mixture containing at least one carrier gas and at least one perfluorocompound gas, said process comprising the steps of:
A process for the separation and recovery of at least one perfluorocompund gas from a gas mixture containing at least one carrier gas and at least one perfluorocompund gas, said process comprising the steps of:
A process for the separation and recovery of at least one perfluorocompound gas from a gas mixture containing at least one carrier gas and perfluorocompound gases, said process comprising the steps of:
Dependencies are inferred from the claim text.