Electrohydrodynamicly enhanced micro cooling system for integrated circuits

Means for moving a cooling fluid, said moving means comprising a surface having a heated portion and an unheated portion and interleaved first and second arrays of substantially parallel linear microelectrodes positioned on the surface and extending over both the heated and unheated surface portions,

• the moving means further including means for applying a sufficiently high non-reversing electromotive potential between the first and second arrays to create a polarization effect on the fluid, the first array thereby having a positive electrical potential with respect to the second array and the second array having a negative electrical potential with respect to the first array, whereby fluid is caused to flow along the lines of the microelectrodes, and enclosing means for channeling fluid flow along the microelectrode lines.

Means for moving a cooling fluid, said moving means comprising a surface comprising an insulating substrate selected from the group consisting of silicon, quartz ceramic and sapphire, and interleaved first and second arrays of substantially parallel linear microelectrodes positioned on the surface,

• the moving means further including means for applying a sufficiently high non-reversing electromotive potential between the first and second arrays to create a polarization effect on the fluid, the first array thereby having a positive electrical potential with respect to the second array and the second array having a negative electrical potential with respect to the first array, whereby fluid is caused to flow along the lines of the microelectrodes.

Means for moving a cooling fluid, said moving means comprising a surface and interleaved first and second arrays of substantially parallel linear microelectrodes positioned on the surface, each microelectrode having a thickness, a width and a separation distance, and further providing that the thickness of the microelectrodes is between 0.3 μm and 10 μm, the width between 2 μm and 50 μm and the distance between adjacent microelectrodes between 2 μm and 100 μm,

• the moving means further including means for applying a substantially constant non-reversing electromotive potential between the first and second arrays, the first array thereby having a positive electrical potential with respect to the second array and the second array having a negative electrical potential with respect to the first array.

Means for moving a cooling fluid, said moving means comprising a surface and interleaved first and second arrays of substantially parallel linear microelectrodes positioned on the surface to form an interleaved array, the interleaved array having a first end adjacent the end of the first array and a second end adjacent the end of the second array, the moving means further including means for applying a non-reversing electromotive potential between the first and second arrays, whereby fluid is caused to flow along the lines of the microelectrodes, away from the first array end and toward the second array end.

Means for moving a cooling fluid, said moving means comprising a surface and interleaved first and second arrays of substantially parallel linear microelectrodes alternately positioned on the surface to form an interleaved array,

• the moving means further including means for applying a sufficiently high non-reversing electromotive potential between the first and second arrays to create a polarization effect on the fluid, the first array thereby having a positive electrical potential with respect to the second array and the second array having a negative electrical potential with respect to the first array, whereby fluid is caused to flow along the lines of the microelectrodes, and enclosing means for channeling fluid flow along the microelectrode lines.