Material handling and transport system and process

A material handling and transport system for moving material supported by a carrier between storage and processing destinations, comprising;

• a vehicle configured to run on a support structure and comprising:
• a carrier nest configured to receive and support a carrier capable of holding a material to be transported, wherein the carrier nest maintains the carrier at an incline configured to prevent material in the carrier from falling out of an opening in the carrier during transport and handling, and
• a lifting mechanism operative to vertically raise and lower the carrier nest;
• a load port support surface disposed vertically above the support structure, an opening provided in the load port support surface sized to allow vertical passage of the carrier therethrough;
• a load port nest on the load port support surface configured to receive and support the carrier adjacent a selected destination;
• and
• a carrier manipulation mechanism operative to manipulate the carrier from a raised position on the carrier nest and elevated through the opening in the support surface to a load position on the load port nest.

A material handling and transport system for moving material supported by a carrier between storage and processing destinations, comprising:

• a vehicle configured to run on a support structure and comprising:
• a carrier nest configured to receive and support a carrier capable of holding a material to be transported, and
• a lifting mechanism operative to vertically raise and lower the carrier nest;
• a load port support surface disposed vertically above the support structure, an opening provided in the load port support surface sized to allow vertical passage of the carrier therethrough;
• a load port nest on the load port support surface configured to receive and support the carrier adjacent a selected destination;
• and
• a carrier manipulation mechanism operative to manipulate the carrier from a raised position on the carrier nest and elevated through the opening in the support surface to a load position on the load port nest;
• wherein the carrier manipulation mechanism comprises an actuator attached to the lifting mechanism and operable to rotate the carrier nest from the raised position to a position over the load port nest;
• and
• the load port support surface further includes arcuate slots therein to allow passage of protruding portions of the carrier nest therethrough during rotation of the vehicle.

A material handling and transport system for moving material supported by a carrier between storage and processing destinations, comprising:

• a vehicle configured to run on a support structure and comprising:
• a carrier nest configured to receive and support a carrier capable of holding a material to be transported, and
• a lifting mechanism operative to vertically raise and lower the carrier nest;
• a load port support surface disposed vertically above the support structure, an opening provided in the load port support surface sized to allow vertical passage of the carrier therethrough;
• a load port nest on the load port support surface configured to receive and support the carrier adjacent a selected destination, wherein the load port nest comprises a plurality of pins configured to mate with corresponding recesses on a bottom surface of the carrier;
• and
• a carrier manipulation mechanism operative to manipulate the carrier from a raised position on the carrier nest and elevated through the opening in the support surface to a load position on the load port nest.

A material handling and transport system for moving material supported by a carrier between storage and processing destinations, comprising:

• a vehicle configured to run on a support structure, wherein the support structure and vehicle are provided in a tunnel, the vehicle comprising:
• a carrier nest configured to receive and support a carrier capable of holding a material to be transported, and
• a lifting mechanism operative to vertically raise and lower the carrier nest;
• a load port support surface disposed vertically above the support structure, the load port support surface comprising a top surface of the tunnel, an opening provided in the load port support surface sized to allow vertical passage of the carrier therethrough;
• a load port nest on the load port support surface configured to receive and support the carrier adjacent a selected destination;
• and
• a carrier manipulation mechanism operative to manipulate the carrier from a raised position on the carrier nest and elevated through the opening in the support surface to a load position on the load port nest.

A semiconductor manufacturing facility comprising:

• a carrier containing semiconductor wafers;
• and
• a material handling and transport system for moving material supported by the carrier between storage and processing destinations, comprising:
• a vehicle configured to run on a support structure and comprising:
• a carrier nest configured to receive and support the carrier, and
• a lifting mechanism operative to vertically raise and lower the carrier nest;
• a load port support surface disposed vertically above the support structure, an opening provided in the load port support surface sized to allow vertical passage of the carrier therethrough;
• a load port nest on the load port support surface configured to receive and support the carrier adjacent a selected destination;
• and
• a carrier manipulation mechanism operative to manipulate the carrier from a raised position on the carrier nest and elevated through the opening in the support surface to a load position on the load port nest.

A material handling and transport system for moving material supported by a carrier between storage and processing destinations, comprising:

• carrier capable of holding a material to be transported;
• a vehicle configured to run on a support structure and comprising:
• a carrier nest configured to receive and support the carrier capable of holding a material to be transported, and
• a lifting mechanism operative to vertically raise and lower the carrier nest;
• a load port support surface disposed vertically above the support structure;
• an opening provided in the load port support surface sized to allow vertical passage of the carrier therethrough;
• a load port nest on the load port support surface configured to receive and support the carrier adjacent a selected destination;
• and
• a carrier manipulation mechanism operative to manipulate the carrier from a raised position on the carrier nest and elevated through the opening in the support surface to a load position on the load port nest.