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US 6,443,618 B1Granted
Particulate free air bearing and seal
AssigneeMoore Epitaxial, Inc.
InventorsKatsuhito Nishikawa, Thomas F. Carlos
Life of this patent
Estimating the term…
Abstract
A particulate free air bearing and seal is formed between a slide and an air bearing body. Pressurized gas is supplied to an air bearing region between the slide and the air bearing body. The pressurized gas causes the slide to float on the air bearing body thus avoiding particulate generation due to friction between the slide and the air bearing body. Vacuum is simultaneously supplied to a collector. The collector captures the pressurized gas and any particulates entrained within the pressurized gas preventing the particulates from entering and contaminating a clean area.
Claims20
A structure comprising:
- a slide having a first air bearing surface;
- an air bearing body having a second air bearing surface comprising a seal cavity, said air bearing body further comprising a pressurized gas inlet port and a vacuum port;
- a distributor in said second air bearing surface coupled to said pressurized gas inlet port;
- a collector in said second air bearing surface coupled to said vacuum port;
- and
- a seal located within said seal cavity.
3 more elements
Dependencies are inferred from the claim text.