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AssigneeSony Corporation
InventorsMasanobu Yamamoto, Toshiyuki Kashiwagi, Shingo Imanishi
Estimating the term…
A beam irradiation apparatus includes a beam generation source (41) for generating at least either of an optical beam, an electron beam and an ion beam, and a focusing lens (48) for focusing a beam emitted from the beam generation source (41). The beam irradiation apparatus includes at least first and second focus control mechanisms (71) and (72) each controlling a focus position of the beam with respect to the same lens system forming the focusing lens, so as to focus the beam onto an irradiation object (40) by using the focusing lens (48), whereby it possible to obtain a minute beam spot and to conduct a reliable, and stable focus control.
In a beam irradiation apparatus comprising a beam generation source for generating at least one of an optical beam, an electron beam, and an ion beam, and a focusing lens for focusing a beam emitted from the beam generation source, comprising:
An optical apparatus having a beam generation source and a focusing lens for focusing a beam emitted from the beam generation source,
In a method for manufacturing an original disk for fabricating an information recording medium on which fine concave and convex are formed,
A method for manufacturing an information recording medium having minute concave and convex formed thereon, comprising:
Dependencies are inferred from the claim text.