Apparatus for testing emissive cathodes in matrix addressable displays
AssigneeMicron Technology, Inc.
InventorsJim Browning, Charles M. Watkins, David A. Cathey
Life of this patent
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Abstract
A method of electrically testing pixel functionality is provided comprising releasably disposing a wafer in a socket. The wafer has at least one baseplate comprised of cathode emitters arranged in pixels. The socket has pads. The socket pads are contacted with test pins, and each of the pixels is addressed individually, thereby causing the cathode emitters to emit electrons in a current. The current is collected from each of the pixels on an anode screen. Alternatively, the anode card may have pins, and these pins contact pads on the baseplate. The baseplate, or substrate with baseplates, does not require a socket with pins.
Claims23
An assembly useful for testing electron emissive cathodes comprising:
- a collector;
- a wafer support device for releasably supporting a wafer opposite said collector, a high vacuum exists between said collector and said wafer support device;
- and
- contact pins for contacting said wafer located above said wafer support device, and for testing a number of electron emissive cathodes located on said wafer.
A testing apparatus useful for measuring emitted electron current comprising:
- a socket in which to dispose a substrate having cathodes;
- an anode disposed opposite said socket for collecting electron emissions from said cathodes, a high vacuum existing between said socket and said anode;
- and
- contact pins disposed in said socket, said contact pins for making contact with said substrate.
A wafer probe station useful for testing wafers under vacuum, comprising:
- a probe chamber comprising:
- a probe card having pins and an anode plate, said anode plate having a luminescent film disposed thereon;
- and
- a testing stage disposed opposite said probe card, said testing stage comprising a socket for releasably supporting said wafers.
Dependencies are inferred from the claim text.