Probing apparatus and head plate opening/closing force-reducing mechanism
AssigneeTokyo Electron Limited
InventorsTadashi Obikane, Masashi Shimizu
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Abstract
A head plate opening/closing force-reducing mechanism includes a head plate (13) one end of which is rotatably attached (13B) to a main body so as to open/close an opening (31) formed in the main body (10), and at least one push-up mechanism (16, 17, 18) attached to at least one edge (36) of the head plate, the push-up mechanism being located in a position close to an opposite end of the head plate.
Claims20
A head plate opening/closing mechanism comprising:
- a main body having an opening;
- a head plate one end of which is rotatably attached to the main body so as to open and close the opening of the main body;
- and
- at least one set of push-up mechanisms including at least two push-up mechanisms coupled in series to each other;
- wherein one end of the at least one set of push-up mechanisms is attached to the head plate, and one of the two push-up mechanisms pushes up another push-up mechanism.
The head plate opening/closing mechanism according to clam 1, wherein the push-up mechanism attached to the main body pushes up a push-up mechanism having a push-up direction guide along the push-up direction guide.
The head plate opening/closing mechanism according to clam 1, wherein the at least one set of push-up mechanisms comprises a first push-up mechanism attached to the main body, a second push-up mechanism having a push-up direction guide, and a third push-up mechanism one end of which is attached to the head plate.
The head plate opening/closing mechanism according to clam 1, wherein the at least one set of push-up mechanisms comprises a first push-up mechanism attached to the main body, a second push-up mechanism coupled in series to the first push-up mechanism and having a push-up direction guide, and a third push-up mechanism which is coupled in series to the second push-up mechanism and one end of which is attached to the head plate.
The head plate opening/closing mechanism according to clam 1, wherein said at least one set of push-up mechanisms includes at least one push-up mechanism comprising a gas spring.
A probing apparatus comprising:
- a main body having an opening;
- a head plate having an attached portion rotatably attached to the main body;
- and
- at least one set of a plurality of push-up mechanisms configured to open and close the head plate to cover the opening of the main body, the plurality of push-up mechanisms coupled in series such that a lower one of the plurality of push-up mechanisms lifts and lowers an upper one of the plurality of push-up mechanisms sequentially.
The probing apparatus according to clam 13, wherein the plurality of push-up mechanisms include a push-up mechanism attached to the main body and configured to lift and lower a push-up mechanism having a push-up direction guide along the push-up direction guide.
The probing apparatus according to clam 12, wherein the plurality of push-up mechanisms comprises a first push-up mechanism attached to the main body, a second push-up mechanism having a push-up direction guide, and a third push-up mechanism attached to the head plate.
The probing apparatus according to clam 12, wherein the plurality of push-up mechanisms comprises a first push-up mechanism attached to the main body, a second push-up mechanism coupled in series to the first push-up mechanism and having a push-up direction guide, and a third push-up mechanism positioned between the second pushup mechanism and the head plate.
The probing apparatus according to clam 12, wherein the plurality of push-up mechanisms comprises at least one push-up mechanism comprising a gas spring.
Dependencies are inferred from the claim text.