Probe contact system having planarity adjustment mechanism

A planarity adjustment mechanism for a probe contact system for establishing electrical connection with contact targets, comprising:

• a contact substrate having a plurality of contactors mounted on a surface thereof;
• a probe card for establishing electrical communication between the contactors and a test head of a semiconductor test system;
• a conductive elastomer provided between the contact substrate and the probe card;
• a connection member for connecting the contact substrate and the probe card at three points on the contact substrate and probe card, said connection member changing an angle of the contact substrate relative to the probe card when it is driven;
• a gap sensor for measuring a gap between the contact substrate and the target substrate in a non-contact manner at three points on the contact substrate, said gap sensor being directly formed on the contact substrate;
• a controller for producing a control signal based on the gap measured by the gap sensor;
• and
• a motor for driving said connection member in response to the control signal from the controller to change said angle, thereby adjusting distance between the probe card and the contact substrate.