Electrode for glow-discharge atmospheric-pressure plasma treatment

An electrode assembly for producing a glow-discharge plasma in a process space adjacent thereto at substantially atmospheric pressure, comprising the following combination of components:

• a first electrode facing said process space;
• a second electrode comprising a metallic porous layer facing said process space alongside the first electrode;
• a layer of dielectric material interposed between the first electrode and the process space and between the first and second electrodes;
• means for applying a voltage across the electrodes;
• and
• means for diffusing a plasma gas through the metallic porous layer into the process space at substantially atmospheric pressure.

An electrode assembly for producing a glow-discharge plasma in a process space adjacent thereto at substantially atmospheric pressure, comprising the following combination of components:

• a plurality of electrodes encased in a dielectric material facing said process space;
• at least one metallic porous layer facing the process space and enclosed within the dielectric material encasing said plurality of electrodes;
• means for applying a voltage across pairs of said plurality of electrodes;
• and
• means for diffusing a plasma gas through the metallic porous layer into the process space at substantially atmospheric pressure.

An electrode assembly for producing a glow-discharge plasma in a process space adjacent thereto at substantially atmospheric pressure and for treating a target substrate within said process space, comprising the following combination of components:

• a plurality of electrodes encased in a dielectric material and disposed planarly facing said process space from a single side;
• means for applying a voltage across pairs of said plurality of electrodes;
• means for supplying a plasma gas in said process space at substantially atmospheric pressure;
• and
• means for passing the target substrate through said process space along a plane facing said plurality of electrodes.

A method for producing a glow-discharge plasma in a process space at substantially atmospheric pressure, comprising the following steps:

• providing a first electrode and a second electrode separated by a dielectric material and facing said process space;
• applying a voltage across the electrodes;
• and
• diffusing a plasma gas into the process space through a porous material at substantially atmospheric pressure.