Apparatus and methods for generating persistent ionization plasmas
AssigneePhysical Sciences, Inc.
InventorsJohn E. Brandenburg, John F. Kline, Joshua H. Resnick
Life of this patent
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Abstract
A persistent ionization plasma generator is described that forms a plasma in a cavity that persists for a time after termination of the exciting RF electric field. The plasma generator includes a RF cavity that is in fluid communication with a source of ionizing gas. The RF cavity can be at substantially atmospheric pressure. An RF power source that generates an RF electric field is electromagetically coupled to the RF cavity. An ultraviolet light source is positioned in optical communication to the cavity. An antenna is positioned within the cavity adjacent to the ultraviolet light source. A chamber for confining the plasma can be positioned in the cavity around the antenna.
Claims20
A persistent ionization plasma generator comprising:
- a) a RF cavity for operation at ambient pressure that is in fluid comminication with a source of ionizing gas;
- b) a RF power source that is electromagetically coupled to the RF cavity, the RF power source providing a RF electric field to the cavity;
- c) an ultraviolet light source that is in optical communication with the cavity;
- and
- d) an antenna that is positioned within the cavity adjacent to the ultraviolet light source, wherein a plasma is formed in the cavity that persists for a time after termination of the RF electric field.
A method of generating a persistent ionization plasma, the method comprising:
- a) injecting an ionizing gas at ambient pressure into a RF cavity;
- b) electromagnetically coupling a RF electric field to the cavity;
- c) providing an antenna that assists in the ignition of a plasma;
- d) optically coupling ultraviolet radiation into the cavity, thereby causing ignition of a plasma;
- and
- e) terminating the RF electric field, wherein the plasma persists for a time after termination of the RF electric field.
A method of toxic gas abatement, the method comprising the steps of:
- a) injecting an ionizing gas at ambient pressure into a RF cavity;
- b) injecting a toxic gas into the RF cavity;
- c) electromagnetically coupling a RF electric field to the cavity;
- d) providing an antenna that assists in the ignition of a plasma;
- e) optically coupling ultraviolet radiation into the cavity, thereby causing ignition of a plasma;
- f) terminating the RF electric field, wherein the plasma persists for a time after termination of the RF electric field, abating the toxic gas;
- and
- g) exhausting the abated toxic gas.
Dependencies are inferred from the claim text.