US 6,441,494 B2 · Microelectronic contacts

Abstract

A method for producing reliable contacts in microelectronic devices and contacts produced thereby are provided. In one embodiment of the invention, a first conductive layer is formed over a first dielectric layer. The first conductive layer contains a pattern etched therein. A second dielectric layer is deposited over the first conductive layer and a via is etched therein over the pattern, thus exposing a portion of the pattern and the first conductive layer. The structure is then further etched to remove a portion of the first dielectric layer using the exposed portions of the first conductive layer as a mask. The structure is then subject to an isotropic etch to create undercuts in the first dielectric layer underneath the exposed portions of the first conductive layer. A conductive material can then be deposited into the via to fill the undercut, thus contacting the first conductive material on the exposed top, sides, and underside of the layer to produce a highly reliable contact. This technique is also adapted to create vias that are used to connect three or more conductive layers.

Claims17

Dependent claims

A contact structure for connecting a first conductive layer and a second conductive layer in a microelectronic device, comprising:

a first dielectric layer formed on a substrate;
a first conductive layer formed on the first dielectric layer, the first conductive layer having a pattern etched therein, the pattern defining an edge in the first conductive layer;
a second dielectric layer deposited on the top surface of the first conductive layer;
a hole located in the second dielectric layer and at least part of the first dielectric layer, wherein the hole exposes at least a portion of the edge in the first conductive layer and wherein the hole defines an undercut region in the first dielectric layer below the first conductive layer;
a conductive material located in the hole, wherein the conductive material substantially fills the undercut region, and wherein the conductive material is in contact with at least a portion of the exposed edge in the first conductive layer;
and
a second conductive layer in contact with the conductive material, whereby the first and second conductive layers are brought into contact through the conductive material.

4 more elements

A contact structure for connecting a first conductive layer, a second conductive layer, a third conductive layer, and a fourth conductive layer in a microelectronic device, comprising:

a first conductive layer formed on a substrate, the first conductive layer having a top surface;
a first dielectric layer deposited on the top surface of the first conductive layer;
a second conductive layer formed on the first dielectric layer, the second conductive layer having a first pattern etched therein, the first pattern defining an edge in the second conductive layer;
a second dielectric layer formed on the top surface of the second conductive layer;
a third conductive layer formed on the second dielectric layer, the third conductive layer having a second pattern etched therein, the second pattern defining an edge in the third conductive layer;
a third dielectric layer formed on the top surface of the third conductive layer;
a hole located in the third, second, and first dielectric layers, wherein the hole exposes at least:
a portion of the edges in the third and second conductive layers, and
a portion of the top surface of the first conductive layer;
a conductive material located in the hole, wherein the conductive material substantially fills the hole, and wherein the conductive material is in contact with at least:
a portion of the exposed edges in the third and second conductive layers, and
a portion of the exposed top surface of the first conductive layer;
and
a fourth conductive layer in contact with the conductive material, whereby the first, second, third, and fourth conductive layers are brought into contact through the conductive material.

11 more elements

Dependencies are inferred from the claim text.

Microelectronic contacts

Life of this patent

Microelectronic contacts

Life of this patent

Abstract

Claims17