Thin film resistor with stress compensation

Abstract

A thin film resistor element which maintains its resistance value when stress is applied such as during packaging, so that the resistor element may be used in a high precision bleeder resistor circuit to maintain an accurate voltage dividing ratio. The thin film resistor element has a P-type thin film resistor formed of a P-type semiconductor thin film and an N-type thin film resistor formed of an N-type semiconductor thin film, so that a change in resistance value when stress is applied is prevented. In a bleeder resistor circuit, a resistance value of one unit is regulated by a resistance value formed by a combination of the P-type thin film resistor and the N-type thin film resistor so that, even in the case where stress is applied, a change in resistance values of the respective resistor elements cancel out each other and an accurate voltage dividing ratio can be maintained.

Dependencies are inferred from the claim text.