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US 6,441,392 B1Granted
Device based on quantic islands and method for making same
AssigneeCommissariat a l'Energie Atomique
InventorsJacques Gautier, François Martin
Life of this patent
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Abstract
A quantic effect device which functions using a Coulomb blockade phenomenon. The device includes two electron reservoirs, two sets of islands that are separated by a dielectric layer, a protective insulating layer and a control electrode.
Claims13
Quantic effect device, that operates making use of a Coulomb blockade phenomenon, comprising:
- a first and a second electron reservoirs,
- a conducting channel located between the first and second electron reservoirs, said conducting channel comprising a first subset of conducting islands, wherein a space between said conducting islands of said first subset is partially filled by covering said conducting islands with a tunnel insulating layer, and a remaining space not filled by said tunnel insulating layer is filled by a second subset of conducting islands so that said first subset and second subset of conducting islands form only one layer of conducting islands;
- a protective insulating layer covering the layer of conducting islands;
- and
- a control electrode covering the insulating layer.
2 more elements
Process for making a quantic effect device or a microelectric device, comprising the following steps:
- a) forming a first and a second electron reservoirs,
- b) forming a conducting channel located between the first and second electron reservoirs, said conducting channel comprising a first subset of conducting islands,
- c) forming a tunnel insulating layer above the first subset of conducting islands to partially fill space between conducting islands;
- and
- d) forming a second subset of conducting islands above the tunnel insulating layer, so that a remaining space not filled by said tunnel insulating layer is filled by the conducting islands of the second subset, said first subset and second subset of conducting islands forming only one layer of conducting islands.
2 more elements
Dependencies are inferred from the claim text.