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US 6,441,373 B1Granted
Infrared photodetector and method of manufacturing the same
AssigneeFujitsu Limited
InventorPrafulla Masalkar
Life of this patent
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Abstract
An infrared photodetector comprising of a photoabsorption layer formed on a substrate comprising of a multiquantum well structure, and a diffraction pattern formed over the photoabsorption layer. The diffraction pattern has recesses whose planar shape contains curves. Accordingly, the infrared photodetector can be formed by the fewer patterning steps and can detect the infrared radiation efficiently.
Claims11
An infrared photodetector comprising:
- a photoabsorption layer formed on a substrate, said photoabsorption layer having a multiquantum-well structure;
- and
- a diffraction pattern formed on the photoabsorption layer to have recesses planar shape of each of which contains curved shapes and sectional shape of each of which has a single step shape, wherein the diffraction pattern is in contact with a reflecting film to constitute an integral member, and incident light is introduced from outside of the substrate and passes through the substrate and the photoabsorption layer to the reflecting film in a direction perpendicular to a surface of the photoabsorption layer.
A method of manufacturing an infrared photodetector comprising the steps of:
- forming a photoabsorption layer having a multiquantum-well structure on a substrate;
- forming a light transmitting layer on the photoabsorption layer;
- forming a mask, on which patterns having curved shapes are formed, on the light transmitting layer;
- forming a diffraction pattern on the light transmitting layer by etching the light transmitting layer in areas which are not covered with the mask;
- forming a reflection film in contact with the diffraction pattern such that light can be introduced from outside of the substrate so as to pass through the substrate and the photoabsorption layer to the reflection film in a direction perpendicular to a surface of the photoabsorption layer;
- and
- removing the mask.
4 more elements
Dependencies are inferred from the claim text.