Infrared focal plane array detector and method of producing the same

A method of producing an infrared focal plane array detector wherein a plurality of bolometer detectors are formed in a two-dimensional array on a substrate and said bolometers are successively selected to detect infrared rays incoming to positions of said bolometer detectors, said method of producing an infrared focal plane array detector comprising:

• forming switching transistors for selecting said bolometer detectors on said substrate;
• forming a sacrificial layer on said substrate;
• forming a film made of a bolometer material and a protective film on said sacrificial layer such that said film is held between said protective film;
• etching said film made of the bolometer material into a predetermined shape and covering said film with said protective film;
• forming, in accordance with an application of said bolometer detectors, an infrared ray absorption film for a first bolometer detector and a third bolometer detector, and forming one of an infrared ray reflection film and a light interception film for a second bolometer detector on said protective film, and patterning said infrared absorption film, and one of said infrared reflection film and light interception film, into a predetermined shape;
• removing said sacrificial layer, except at a predetermined location including said third bolometer detector, to form a space;
• and
• containing said space under a vacuum state.

An infrared focal plane array detector made by a method of producing an infrared focal plane array detector wherein a plurality of bolometer detectors are formed in a two-dimensional array on a substrate and said bolometers are successively selected to detect infrared rays incoming to positions of said bolometer detectors, said method of producing and infrared focal plane array detector comprising:

• forming switching transistors for selecting said bolometer detectors on said substrate;
• forming a sacrificial layer on said substrate;
• forming a film made of a bolometer material and a protective film on said sacrificial layer, such that said film is held between said protective film;
• etching said film made of the bolometer material into a predetermined shape and covering said film with said protective film;
• forming, in accordance with an application of said bolometer detectors, an infrared ray absorption film for a first bolometer detector and a third bolometer detector, and forming one of an infrared ray reflection film and a light interception film for a second bolometer detector on said protective film and patterning said infrared absorption film, and one of said infrared reflection film and light interception film, into a predetermined shape;
• removing said sacrificial layer, except at a predetermined location including said third bolometer detector, to form a space;
• and
• containing said space under a vacuum state.

An infrared focal plane array detector wherein a plurality of bolometer detectors are arranged in a two-dimensional array forming columns and rows on a substrate, and each of said plurality of bolometer detectors is successively selected to detect an infrared ray incoming to its position, said plurality of bolometer detectors comprising:

• first bolometer detectors having a thermal isolation structure, between the first bolometer detectors and said substrate, for thermally isolating the first bolometer detectors and said substrate from each other, said first bolometer detectors being disposed in an infrared detection area on said substrate for receiving infrared rays;
• second bolometer detectors having a thermal isolation structure between the second bolometer detectors and said substrate for thermally isolating the second bolometer detectors from said substrate, the second bolometer detectors receiving no infrared rays;
• third bolometer detectors provided on said substrate;
• and
• fourth bolometer detectors provided on said substrate;
• wherein one of the first bolometer detectors and one of the third bolometer detectors are disposed on the same column and connected to each other at a first junction;
• one of the second bolometer detectors and said one of the first bolometer detectors are on the same row, and
• one of the fourth bolometer detectors and said one of the second bolometer detectors are disposed on the same column, and connected to each other at a second junction.

An infrared focal plane array detector wherein a plurality of bolometer detectors are arranged in a two-dimensional array forming columns and rows on a substrate, and each of said plurality of bolometer detectors is successively selected to detect an infrared ray incoming to its position, said plurality of bolometer detectors comprising:

• first bolometer detectors having a thermal isolation structure, between the first bolometer detectors and said substrate, for thermally isolating the first bolometer detectors and said substrate from each other, the first bolometer being disposed in an infrared detection area on said substrate for receiving infrared rays;
• second bolometer detectors having a thermal isolation structure between the second bolometer detectors and said substrate for thermally isolating the second bolometer detectors from said substrate, the second bolometer detectors receiving no infrared rays;
• third bolometer detectors provided on said substrate;
• and
• fourth bolometer detectors provided on said substrate;
• wherein one of the first bolometer detectors and said one of the second bolometer detectors are disposed on the same column and connected to each other at a first junction;
• one of the third bolometer detectors and one of the first bolometer detectors are disposed on the same row;
• and
• said one of the third bolometer detectors and one of the fourth bolometer detectors are disposed on the same column and connected to each other at a second junction.