Scanning probe microscope

In a scanning probe microscope including a probe having a cantilever and a tip attached to one end of the cantilever, said scanning probe microscope comprising:

• a probe movement means for moving a probe to provide positioning of the probe with respect to a sample surface;
• means for detecting change of deflection of a cantilever or change of amplitude, frequency and phase angle of the cantilever;
• means for controlling the probe movement means, wherein the probe movement means is controlled based on data received from the detecting means so that deflection or amplitude of the cantilever maintains a predetermined setpoint during a first scan of the probe along the sample surface, wherein the probe is positioned at a predetermined height on an imaginary inclined plane which makes a predetermined angle with reference to an average plane of the sample surface and which is defined over an area of interest on the sample surface, and wherein the probe movement means is controlled so that a second scan is provided at a plurality of positions on the inclined plane during downward movement of the probe along the inclined plane;
• means for storing data transmitted from the control means;
• and
• means for analyzing the stored data, wherein the average plane of the sample surface is determined based on data from the first scan, and wherein the imaginary inclined plane is defined over the area of interest on the sample surface.