Method for controlling an amount of material delivered during a material transfer

A method for controlling an amount of material delivered during a material transfer, comprising the steps of:

• inputting a target amount for a material to be delivered from a source location to a target location;
• updating the target amount during the delivery of the material using a predictive model-based algorithm;
• updating said predictive model-based algorithmn based on process performance data using a recursive least-squares procedure, wherein an adaptive selection algorithm is used to determine whether at least one previous predictive model-based algorithm parameter should be replaced with at least one new predictive model-based algorithm parameter in order to adapt the predictive model-based algorithm in response to a process change, said determination is based on process performance data;
• defining a coordinate system to display values of a dependent variable versus values of at least one independent variable, said dependent variable being related to said independent variable by a mathematical function defining a predictive model;
• defining a closed reference box on said coordinate system, said closed reference box having a fixed center point located at values of said dependent and independent variables based on predetermined acceptable material delivery data values, wherein dimensions of said closed reference box are initially set based on predetermined acceptable material delivery data values, wherein said dimensions and said center point being subject to a rule-based adjustment using process performance data;
• defining a finite number of successively smaller closed selection boxes on said coordinate system, said closed selection boxes having each a center point located at values of said dependent and independent variables based on current averaged values of said dependent and independent variables as calculated from process performance data, wherein dimensions of said closed selection boxes are defined by successively smaller fractional multiples of said closed reference box dimensions;
• and
• defining at least one decision rule by which a specific new data point having values of said dependent and independent variables derived from process performance data can be used to select a specific rule by which said predictive model will be modified, said selection depending on which of said boxes contain said data point.

A method for controlling an amount of material delivered during a material transfer, comprising the steps of:

• inputting a target amount for a material to be delivered from a source location to a target location;
• delivering the material to the target location, wherein the rate of said delivery need not be controlled;
• updating the target amount during the delivery of the material using a predictive model-based algorithm;
• and
• updating said predictive model-based algorithm based on process performance data using a recursive least-squares procedure.