Method of manufacturing an electro-optical device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Mayumi Mizukami, Toshimitsu Konuma
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Abstract
An object of the invention is reducing a manufacturing cost of an EL display device and an electronic device equipped therewith. In an active matrix type EL display device, an EL material for a pixel portion is formed by coating steps using a dispenser device. As a discharge port of the dispenser is made into a linear shape, the throughput is increased. Such the dispenser device is used, so that it is possible to simplify the EL layer forming steps, then, to reduce the manufacturing cost.
Claims32
A method of manufacturing an electric device;
- said method comprising the steps of:
- forming a first EL forming material using a dispenser,
- forming a second EL forming material over the first EL forming material by a vapor phase growth.
A method of manufacturing an electric device, said method comprising the steps of:
- forming a first EL forming material linearly using a dispenser,
- forming a second EL forming material over the first EL forming material by a vapor phase growth.
A method of manufacturing an electric device, said method comprising the steps of:
- forming a plurality of semiconductor elements over a surface of a substrate;
- forming a plurality of pixel electrodes, each being connected to each of the plurality of semiconductor elements;
- forming a first EL material over the plurality of pixel electrodes;
- and
- forming a second EL material over the first EL material by a vapor phase growth,
- wherein the first EL material is formed by coating an EL forming material use of a dispenser.
A method of manufacturing an electric device, said method comprising the steps of:
- forming a plurality of semiconductor elements over a surface of a substrate;
- forming a plurality of pixel electrodes, each being connected to each of the plurality of semiconductor elements;
- forming a first EL material over the plurality of pixel electrodes;
- forming a second EL material over the first EL material by a vapor phase growth,
- wherein the first EL material is formed by coating an EL forming material and then heating the EL forming material.
A method of manufacturing an electric device, said method comprising the steps of:
- forming a first light emitting organic material using a dispenser,
- forming a second light emitting organic material over the first light emitting organic material by a vapor phase growth.
Dependencies are inferred from the claim text.