Method and apparatus for aligning wafers
AssigneeAdvanced Micro Devices, Inc.
InventorsMichael R. Conboy, Elfido Coss, Jr., Sam H. Allen
Life of this patent
Estimating the term…
Abstract
A method for aligning wafers includes defining a grid on a wafer; determining a grid offset parameter based on an offset between the grid and an external reference point defined on the wafer; and aligning the wafer based on the grid offset parameter and the external reference point. A system for aligning wafers includes a database server and a tool. The database server is adapted to store a grid offset parameter associated with a wafer. The grid offset parameter defines an offset between a grid defined on the wafer and an external reference point defined on the wafer. The tool is adapted to align the wafer based on the grid offset parameter associated with the wafer and the external reference point.
Claims25
A method for aligning waters, comprising:
- defining grid on a wafer;
- determining a grid offset parameter based on an offset between the grid and an external reference point defined on the wafer and being external to the grid;
- and
- aligning the wafer based on the grid offset parameter and the external reference point.
A system for aligning wafers, comprising:
- a database seer adapted to store a grid offset parameter associated with a wafer, the grid offset parameter defining an offset between a grid defined on the wafer and an external reference point defined on the wafer and being external to the grid;
- and
- a tool adapted to align the wafer based on the grid offset parameter associated with the wafer and the external reference point.
A system for aligning wafers, comprising;
- means for determining a grid offset parameter based on an offset between a grid defined on a wafer and an external reference point defined on the wafer and being external to the grid;
- and
- means for aligning the wafer based on the grid offset parameter and the external reference point.
Dependencies are inferred from the claim text.