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US 6,440,817 B2Granted
Methods of forming integrated circuitry
AssigneeMicron Technology, Inc.
InventorJigish D. Trivedi
Life of this patent
Estimating the term…
Abstract
A method of forming integrated circuitry includes forming a shallow junction region within semiconductor material. An anisotropically etched sidewall spacer of a first material comprising at least one of Al2O3 and Ta2O5 is formed laterally proximate the shallow junction region. Trench isolation of a second material different from the first material is formed laterally proximate the anisotropically etched sidewall spacer, with the anisotropically etched sidewall spacer being received intermediate the shallow junction region and the trench isolation of the second material. Other aspects are contemplated.
Claims18
A method of forming integrated circuitry comprising:
- forming a shallow junction region within semiconductor material;
- forming an anisotropically etched sidewall spacer of a first material comprising at least one of Al2O3 and Ta2O5 laterally proximate the shallow junction region;
- and
- forming trench isolation of a second material different from the first material laterally proximate the anisotropically etched sidewall spacer, the anisotropically etched sidewall spacer being received intermediate the shallow junction region and the trench isolation of the second material.
1 more element
A method of forming integrated circuitry comprising:
- forming an isolation trench within semiconductor material, the semiconductor material having an outer surface, the isolation trench having a corner region proximate the outer surface;
- forming a sidewall spacer of a first material comprising at least one of Al2O3 and Ta2O5 within the trench isolation corner region;
- forming trench isolation of a second material different from the first material within the isolation trench laterally proximate the sidewall spacer;
- and
- forming a shallow junction region within the semiconductor material, the sidewall spacer being received intermediate the shallow junction region and the trench isolation of the second material.
2 more elements
A method of forming integrated circuitry comprising:
- forming at least one trench isolation region within a semiconductor substrate, the trench isolation region comprising at least a first region and a second region, the first region being formed at least in part by deposition of isolation material and anisotropic etching thereof to form at least one sidewall spacer, said isolation material comprising a material selected from the group consisting of SixNyOz, Al2O3 and Ta2O5;
- and
- forming a shallow junction region within active area of the semiconductor substrate, with the one sidewall spacer of the first region being received intermediate the shallow junction region and the second region of the trench isolation region.
A method of forming integrated circuitry sequentially comprising:
- forming at least one trench isolation region within a semiconductor substrate, the trench isolation region comprising at least a first region and a second region, the first region being formed at least in part by deposition of isolation material and anisotropic etching thereof to form at least one sidewall spacer, said isolation material comprising a material selected from the group consisting of SixNyOz, Al2O3 and Ta2O5;
- forming a shallow junction region within active area of the semiconductor substrate, with the one sidewall spacer of the first region being received intermediate the shallow junction region and the second region of the trench isolation region;
- forming insulative material over the semiconductor substrate;
- and
- etching a contact opening through the insulative material to the shallow junction region and over the one sidewall spacer, the one sidewall spacer at least in part protecting the shallow junction region from being laterally exposed.
2 more elements
A method of forming integrated circuitry comprising:
- etching a first portion of an isolation trench into a semiconductor material, the first portion having laterally opposing sidewalls within the semiconductor material and a trench base extending therebetween within the semiconductor material;
- depositing a first insulative trench isolation material into the trench first portion to a depth insufficient to fill said first portion within the semiconductor material;
- anisotropically etching the insulative trench isolation material effective to leave a pair of opposing anisotropically etched sidewall spacers over at least a portion of the first portion sidewalls and over laterally opposed portions the first portion trench base;
- with the pair of sidewall spacers in place, etching a second portion of the isolation trench into the semiconductor material through the first portion trench base laterally inward of the spacers;
- depositing a second insulative trench isolation material within the first and second portions of the isolation trench and forming an isolation trench region comprising the first and second portions;
- forming a shallow junction region within the semiconductor material adjacent the first trench portion;
- forming a covering insulative material over the trench isolation region and the shallow junction region;
- and
- etching a contact opening through the covering insulative material to the shallow junction region and the trench isolation region substantially selective to etch the covering insulative material relative to the first insulative trench isolation material within the trench isolation region.
6 more elements
A method of forming integrated circuitry comprising:
- forming a patterned masking layer over a bulk semiconductor substrate, the bulk semiconductor substrate having an outer surface;
- after forming the patterned masking layer, etching a first portion of an isolation trench into the semiconductor substrate, the first portion being received entirely within the semiconductor substrate and having laterally opposing sidewalls and a trench base extending therebetween;
- depositing a first insulative trench isolation material over the substrate and into the trench first portion;
- anisotropically etching the insulative trench isolation material effective to leave a pair of opposing anisotropically etched sidewall spacers over at least a portion of the first portion sidewalls and over laterally opposed portions the first portion trench base;
- with the pair of sidewall spacers in place, etching a second portion of the isolation trench into the semiconductor substrate through the first portion trench base laterally inward of the spacers;
- depositing a second insulative trench isolation material within the first and second portions of the isolation trench and forming an isolation trench region comprising the first and second portions;
- commonly planarize polishing the second insulative trench isolation material, the opposing anisotropically etched spacers and the masking material at least to the bulk semiconductor substrate outer surface;
- forming a shallow junction region within the semiconductor substrate adjacent the first trench portion;
- forming a covering insulative material over the trench isolation region and the shallow junction region;
- and
- etching a contact opening through the covering insulative material to the shallow junction region and the trench isolation region substantially selective to etch the covering insulative material relative to the first insulative trench isolation material within the trench isolation region.
8 more elements
A method of forming integrated circuitry comprising:
- etching a first portion of an isolation trench into a bulk semiconductor substrate, the first portion having laterally opposing sidewalls within the semiconductor substrate and a trench base extending therebetween within the semiconductor substrate, the bulk semiconductor substrate having an outer surface;
- depositing a first insulative trench isolation material into the trench first portion;
- anisotropically etching the insulative trench isolation material effective to leave a pair of opposing anisotropically etched sidewall spacers over at least a portion of the first portion sidewalls and over laterally opposed portions the first portion trench base;
- with the pair of sidewall spacers in place, etching a second portion of the isolation trench into the bulk semiconductor substrate through the first portion trench base laterally inward of the spacers;
- depositing a second insulative trench isolation material within the first and second portions of the isolation trench and forming an isolation trench region comprising the first and second portions;
- removing a portion of the sidewall spacers effective to leave an uppermost surface of the sidewall spacers elevationally flush with the outer surface of the bulk semiconductor substrate immediately thereadjacent;
- forming a shallow junction region within the semiconductor material adjacent the first trench portion;
- forming a covering insulative material over the trench isolation region and the shallow junction region;
- and
- etching a contact opening through the covering insulative material to the shallow junction region and the trench isolation region substantially selective to etch the covering insulative material relative to the first insulative trench isolation material within the trench isolation region.
7 more elements
Dependencies are inferred from the claim text.