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US 6,440,814 B1Granted
Electrostatic discharge protection for sensors
AssigneeSTMicroelectronics S.r.l.
InventorsArnaud Yves Lepert, Danielle A. Thomas
Life of this patent
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Abstract
A structure and method is disclosed for dissipating electrostatic charges comprising an underlying dielectric layer disposed over capacitor plates of sensor circuitry, and a conductive layer and passivation layers disposed over the underlying dielectric layer wherein the conductive layer diffuses electrostatic charges at the surface of the integrated circuit.
Claims20
A method of forming an electrostatic discharge device, comprising:
- forming a composite protection layer between and over a plurality of conductive plates which form capacitors with an object when the object is placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object,
- wherein the protection layer isolates the conductive plates and protects the conductive plates from damage, and
- wherein the protection layer comprises a dielectric region between and over the plurality of conductive plates and an electrostatic discharge region overlying at least part of the dielectric region, at least a portion of the protection layer having an opening therethrough over at least one of the conductive plates.
A method of forming an electrostatic discharge device, comprising:
- forming a dielectric layer over a plurality of conductive plates which form capacitors with an object when the object is placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object, the dielectric layer isolating the conductive plates;
- and
- forming a conductive layer disposed over at least a portion of the dielectric layer adjacent to one or more conductive plates, the conductive layer having an opening therethrough over at least one of the conductive plates,
- wherein the conductive layer dissipates an electrostatic charge in a manner which prevents the electrostatic charge from reaching the plurality of conductive plates.
1 more element
A method of forming a device, comprising:
- forming a dielectric layer over a plurality of conductive plates which form capacitors with an object when the object is placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object, the dielectric layer isolating the conductive plates;
- forming a passivation layer over the dielectric layer, the passivation layer having openings therethrough over the conductive plates;
- and
- forming electrostatic discharge regions over the conductive plates within the openings through the passivation layer.
1 more element
Dependencies are inferred from the claim text.