Securing an optical component onto a micro bench
AssigneeJDS Uniphase Corporation
InventorRobert W. Musk
Life of this patent
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Abstract
A method of attaching a component onto a microbench includes laying the component in a groove in the substrate, and locally deforming a portion of the groove, to thereby hold the component in the groove. Preferably, the microbench is a silicon substrate used for MEMs-type structures in the fiber optics industry. In particular, the method is used for securing an optical fiber in a groove, DRI etched from a silicon substrate, before or after the fiber is aligned with other optical components, i.e. lenses, lasers etc. The local deformation is done using a laser welding device selected to be effective in locally melting the substrate while leaving the component relatively undamaged.
Claims19
A method of securing a component onto an integrated circuit substrate comprising the steps of:
- a) positioning the component into a groove formed in the substrate;
- and
- b) directing at least one laser beam of wavelength and power capable of locally deforming a portion of one side of the groove for securing the component in the groove without substantially damaging the component.
Dependencies are inferred from the claim text.