Method for fabricating an infrared-emitting light-emitting diode
AssigneeSiemens Aktiengesellschaft
InventorsReinhard Sedlmeier, Ernst Nirschl, Norbert Stath
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AssigneeSiemens Aktiengesellschaft
InventorsReinhard Sedlmeier, Ernst Nirschl, Norbert Stath
Estimating the term…
A method for fabricating an infrared-emitting light-emitting diode in which a layer sequence is applied onto a semiconductor substrate, preferably composed of GaAs. The layer sequence has, proceeding from the semiconductor substrate, a first AlGaAs cover layer, a GaAs and/or AlGaAs containing active layer and a second AlGaAs cover layer. In which case, the first AlGaAs cover layer and the active layer are fabricated by a metal organic vapor phase epitaxy (MOVPE) method and the second AlGaAs cover layer is fabricated by a liquid phase epitaxy (LPE) method. Furthermore, an electrically conductive coupling-out layer having a thickness of at least about 10 μm is deposited on the second AlGaAs cover layer by the LPE method. The coupling-out layer is optically transparent in the infrared spectral region.
A method for fabricating an infrared-emitting light-emitting diode, which comprises:
A method for fabricating an infrared-emitting light-emitting diode array, which comprises:
Dependencies are inferred from the claim text.