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US 6,440,562 B1Granted
Tungsten super fine particle and method for producing the same
AssigneesKabushiki Kaisha Toshiba, Japan Science and Technology Corporation
InventorsYoshitaka Tamou, Shun-ichiro Tanaka, BingShe Xu
Life of this patent
Estimating the term…
Abstract
A particle of W oxide 2 such as a particle of WO3 is disposed on an amorphous carbon support film 1, onto the particle of W oxide 2 in an atmosphere of high vacuum an electron beam of an intensity of 1023 to 1024 e/cm2·sec being irradiated. Due to the irradiation of an electron beam 3 of such an intensity, ultra fine particles of W 4 of a particle diameter of for instance 10 nm or less are generated. The ultra fine particles of W consist of W effected to detach from the particle of W oxide.
Claims6
A tungsten ultra fine particle system, comprising:
- an amorphous carbon film;
- and
- a plurality of W ultrafine particles disposed on the amorphous carbon film, and consisting essentially of W atoms and/or W clusters detached from a particle of W oxide by irradiating an electron beam of an intensity of 1023 to 1024 e/cm2·sec in an atmosphere of high vacuum to form the W ultra fine particles.
Dependencies are inferred from the claim text.