Electrode and electrolyte for use in preparation of nitrogen trifluoride gas, and preparation method of nitrogen trifluoride gas by use of them
AssigneeMitsui Chemicals, Inc.
InventorsTatsuma Morokuma, Hiromi Hayashida, Akio Kikkawa
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Abstract
An electrode for electrolyzing an electrolyte comprising an ammonium fluoride (NH4F)-hydrogen fluoride (HF)-containing molten salt and having a composition ratio (HF/NH4F) of 1 to 3 to prepare a nitrogen trifluoride (NF3) gas and an electrolyte for use in the preparation of NF3 gas, and a preparation method of the NF3 gas by the use of the electrode and the electrolyte. The electrode comprises nickel having 0.07 wt % or less of Si content and containing a transition metal other than nickel. The electrolyte also contains a transition metal other than nickel.
Claims9
An electrode and an electrolyte comprising an ammonium fluoride (NH4F)-hydrogen fluoride (HF)-containing molten salt and having a composition ratio (HF/NH4F) of 1 to 3 to prepare a nitrogen trifluoride gas, wherein said electrode comprises nickel in which an Si content is 0.07 wt % or less.
A preparation method of a nitrogen trifluoride gas comprising the step of electrolyzing an electrolyte comprising an ammonium fluoride (NH4F)-hydrogen fluoride (HF)-containing molten salt and having a composition ratio (HF/NH4F) of 1 to 3 by the use of a nickel electrode as an anode to prepare a nitrogen trifluoride gas, wherein 0.01 wt % to 2 wt % of at least one of transition metals other than nickel is added to the electrolyte.
Dependencies are inferred from the claim text.