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US 6,440,281 B1Granted
Device for the prevention of arcing in vacuum sputtering installations
AssigneeUnaxis Deutschland Holding GmbH
InventorsJohann Stürmer, Michael Lübbehusen, Gernot Thorn
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Abstract
The invention relates to a device for the prevention of arcing in vacuum sputtering installations. This device comprises a pulse generator which brings the cathode of the sputtering installation at predetermined intervals to a positive potential, whereby a deposing of layers on a target takes place. This deposing prevents the building-up of high voltages which can lead to arcing.
Claims9
Device for the prevention of arcing in vacuum sputtering installations, said device comprising:
- a cathode;
- a first DC voltage source providing a negative potential which is connected to said cathode, said negative potential having a magnitude,
- an inductor connected in series between said first DC voltage source and said cathode,
- a second DC voltage source having a positive electrode connected directly to said cathode, said second DC voltage source having a positive potential with a magnitude which is greater than the magnitude of the negative potential of said first DC voltage source by a magnitude of ΔUK,
- a capacitor connected in parallel with said second DC voltage source,
- a controllable switch between said positive electrode of said second DC voltage source, and
- pulse generating means for closing and opening said switch periodically.
4 more elements
Dependencies are inferred from the claim text.