Multi-anode device and methods for sputter deposition
AssigneeSola International, Inc.
InventorsClive H. Burton, Rodney Pratt, Frank Samson
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Abstract
A method and apparatus for vacuum coating plural articles employs a drum work holder configuration and a sputter source with a plurality of individually controlled anodes for effectively providing uniform coatings on articles disposed at different locations on the drum work holder. A small number of measured process parameters are used to control a small number of process variable to improve coating uniformity from batch to batch.
Claims47
A vacuum coating apparatus for providing optical coatings on plural lens elements, comprising:
- a vacuum chamber;
- a rotatable cylindrical holder for holding the plurality of lens elements;
- and
- at least one sputter source that is elongated along a lengthwise direction and that has a cathode and a plurality of anodes,
- wherein the at least one sputter source is disposed with the lengthwise direction parallel to a rotation axis of the cylindrical holder,
- wherein the anodes are disposed adjacent the cathode substantially along at least one line parallel to the lengthwise direction, and
- wherein the plural lens elements are arranged in columns and rows on the article holder and wherein pairs of anodes at opposite sides of the cathode are configured such each anode pair is aligned with a row on the cylindrical holder.
An apparatus for reactive sputtering of a thin coating onto surfaces of plural articles, comprising:
- a vacuum chamber;
- a sputtering source that is elongated in a lengthwise direction and that has a cathode and a plurality of anodes;
- a rotatable article holder located in the vacuum chamber that rotates the plural articles past the sputtering source;
- and
- a source of reactive gas,
- wherein the articles are arranged on the article holder,
- wherein pairs of anodes on opposite sides of the cathode are powered by a controlled current power supply,
- wherein the articles are arranged in columns and rows on the article holder, and
- wherein each anode pair is aligned with a row on the cylindrical holder.
A multi-anode device for use in sputter deposition, comprising:
- a cathode;
- and
- a plurality of anodes arranged in pairs in predetermined positions adjacent to first and second opposing sides of the cathode,
- wherein the anodes are arranged in a sawtooth pattern on each of the sides of the cathode.
A method for sputter coating a plurality of articles, comprising:
- providing a vacuum chamber having at least one sputter source with a plurality of pairs of anodes and having an article holder that rotates about an axis;
- locating plural articles on a radially outward facing surface of the article holder;
- rotating the article holder relative to the at least one sputter source;
- sputter coating radially outward facing surfaces of the articles while separately controlling current to each pair of anodes to reduce non-uniformity in coating thickness from article to article;
- and
- providing substantially the same amount of current to each active anode pair during sputter coating,
- wherein the articles are arranged in columns and rows on the outward facing surface of the article holder, and wherein the rows are aligned with pairs of anodes.
Dependencies are inferred from the claim text.