Molded non-abrasive substrate carrier for use in polishing operations
AssigneeEntegris, Inc.
InventorTodd Andres
Life of this patent
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Abstract
Thin, planar substrates are carried on a substrate carrier (20) through a polishing operation. The substrate carrier (20) is injection molded or modified-injection molded from a plastic material, and includes one or more receptacles for receiving the substrates to be carried through the polishing process. A drive force transmission arrangement is also included in the substrate carrier (20) through which the carrier may be driven in the polishing process. The substrate carrier (20) is relatively non-abrasive and composed of melt processable engineering polymers or blends. Non-abrasive fillers or reinforcing material may also be included in the plastic.
Claims13
A carrier for transporting thin, planar objects through a polishing operation, the carrier being prepared by a process comprising the steps of:
- (a) forcing a plastic material into a mold while maintaining the mold in at least one partially open position;
- (b) maintaining the plastic material at a substantially constant velocity throughout the volume of the mold as the plastic material is forced into the mold;
- and
- (c) closing the mold to a fully closed position after the step of injecting the plastic material into the mold has been initiated.
A method of manufacturing a carrier for transporting thin, planar objects through a polishing operation, the process comprising the steps of:
- (a) forcing a plastic material into a mold while maintaining the mold in at least one partially open position;
- (b) maintaining the plastic material at a substantially constant velocity throughout the volume of the mold as the plastic material is forced into the mold;
- and
- (c) closing the mold to a fully closed position after the step of injecting the plastic material into the mold has been initiated.
A method of manufacturing a carrier for transporting thin, planar objects through a polishing operation, the process comprising the steps of:
- (a) forcing a plastic material into a mold while maintaining the mold in at least one partially open position;
- and
- (b) closing the mold to a filly closed position after the step of forcing the plastic material into the mold has been initiated.
Dependencies are inferred from the claim text.