Workpiece carrier and polishing apparatus having workpiece carrier

A workpiece carrier for holding a workpiece to be polished and pressing the workpiece against a polishing surface, said workpiece carrier comprising:

• a top ring body being operable to hold the workpiece;
• a drive shaft being operable to rotate said top ring body and move said top ring body to press the workpiece against the polishing surface;
• and
• a joint being operable to transmit a pressing force from said drive shaft to said top ring body while allowing said top ring body to be tilted so as to follow an inclination of the polishing surface, said top ring body being tiltable about a center located on the polishing surface, said joint comprising a rolling element;
• and
• a presser ring being operable to apply a pressing force to the polishing surface.

A workpiece carrier for holding a workpiece to be polished and pressing the workpiece against a polishing surface, said workpiece carrier comprising:

• a drive shaft;
• a first member connected to said drive shaft;
• a second member having a holding surface being operable to hold the workpiece;
• and
• a third member provided between said first member and said second member, said third member having substantially a same axis as an axis of said drive shaft when said holding surface of said second member is substantially parallel to the polishing surface, and said third member being moveable relative to said first member and said second member,
• wherein said third member comprises a rolling element.