Automated semiconductor immersion processing system
AssigneeSemitool, Inc.
InventorsRandy Harris, David Peterson, Jeffry Davis
Life of this patent
Estimating the term…
Abstract
A process system for processing semiconductor wafers includes a stocker module, and immersion module, and a process module. A process robot moves on a lateral rail to transfer wavers between the modules. The immersion module is separated from the other modules, to avoid transmission of vibration. Immersion tanks are radially positioned within the immersion module, to provide a compact design. An immersion robot moves batches of wafers on an end effector between the immersion tanks. The end effector may be detachable from the immersion robot, so that the immersion robot can move a second batch of wafers, while the first batch of wafers undergoes an immersion process.
Claims15
A process system for immersion processing wafers, comprising:
- a stocker module having positions for storing wafers to be processed;
- a process module having at least one process chamber;
- an immersion module adjacent to and detached from the process module to avoid transmission of vibration from the process module to the immersion module;
- and
- a process robot movable between the stocker module, the process module and the immersion module, for carrying wafers to and from the modules.
A process system for immersion processing wafers, comprising:
- a stocker module having positions for storing wafers to be processed;
- a process module;
- an immersion module adjacent to and detached from the process module and the stocker module to avoid transmission of vibration from the process module to the immersion module;
- a track extending along the stocker, process and immersion modules;
- and
- a process robot movable on the track between the stocker module, the process module and the immersion module, for carrying wafers to aid from the modules.
Dependencies are inferred from the claim text.