Mass flow controller automation method and related system
AssigneeIndustrial Technology Research Institute
InventorsYung-Ju Huang, Yun-Sheng Chung, Hann-Tsong Wang, Mu-Huo Cheng, Wen Jiang Yang
Life of this patent
Estimating the term…
Loading patent…
AssigneeIndustrial Technology Research Institute
InventorsYung-Ju Huang, Yun-Sheng Chung, Hann-Tsong Wang, Mu-Huo Cheng, Wen Jiang Yang
Estimating the term…
An MFC controlling device automation method and related system. The method mainly comprises the steps of automatically controlled algorithmic obtaining of MFC open loop system parameters by an identification technique; automatically controlled algorithmic determining of PI control parameters by a dominant pole-placement method; and automatically controlled calculating of a fuzzy logic rule table. The steps form an automatically controlled single closed loop. By performing said steps, multiple PI control parameter sets are obtainable fast and in an automatic way, and a calculation is done to form a refined fuzzy rule data table, so that a greatly enhanced MFC reaction function is attained.
A controlling device automation method in an MFC, comprising the steps of:
A controlling device automation system in an MFC, comprising:
Dependencies are inferred from the claim text.