Uphill screen printing in the manufacturing of microelectronic components
AssigneeMicron Technology, Inc.
InventorsJohn M. Michiels, Darryl M. Stansbury
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AssigneeMicron Technology, Inc.
InventorsJohn M. Michiels, Darryl M. Stansbury
Estimating the term…
Method for screen printing a continuous structure on a substrate wherein the screen printed structure extends from at least a first level to at least a second level. The disclosed method is particularly suitable for the fabrication of microelectronic devices and components thereof including the fabrication of field emission display devices. Preferably, a print screen of a preferred thickness having a preconfigured print pattern formed therethrough, in combination with a squeegee having a hardness within a preferred range, are used to force a screen printable substance onto a substrate while maintaining a portion of the print screen within a preferred reference angle. The resulting screen printed structure extends from at least one lower level to at least one upper level in a continuous “uphill” manner. The disclosed method is particularly suitable for forming continuous electrically conductive structures or circuit traces extending from a lower level of a substrate, such as an anode plate of an FED device, up onto at least one second surface vertically distanced from the substrate. The electrically conductive structure may optionally terminate into a specifically configured contact pad for accommodating complimentary contacting structures located on a mating component, such as a cathode plate of an FED device.
A method of fabricating a microelectronic device comprising:
A method of fabricating at least one electrically conductive trace on a substrate comprising:
A method of providing a multi-level electrically conductive structure comprising:
Dependencies are inferred from the claim text.