Sensor element having temperature measuring means

A pressure sensor comprising:

• a pressure sensor housing assembly of substantially ceramic material, and including:
• a substantially rigid housing part,
• an at least partly movable diaphragm attached to the housing, and
• a cavity formed between the substantially rigid house part and the at least partly movable diaphragm, the cavity containing pressure sensing electrodes,
• the substantially rigid housing part comprising a ceramic plate,
• at least one temperature sensor positioned in the interior of the substantially rigid housing part, separated from the cavity only by the ceramic plate, the ceramic plate being a thin plate having a thickness substantially equal to or larger than the thickness of the at least partly movable diaphragm and at most equal to twice the thickness of the at least partly movable diaphragm.

A pressure sensor, including a temperature sensor, comprising:

• a non-deformable housing comprising a base plate and a shielding plate that is thinner than the base plate;
• a diaphragm attached to the housing, the diaphragm including at least a portion movable with the pressure to be sensed;
• a cavity formed between the diaphragm and a first surface of the shielding plate;
• opposing electrodes formed on the diaphragm and the first surface forming a capacitor for sensing pressure;
• and
• a temperature sensor including first resistive elements positioned between the base plate and a second surface of the shielding plate and second resistive elements positioned on an outward surface of the base plate.