Shielding apparatus for protecting a machine
AssigneeUnited Microelectronics Corp.
InventorsKok-Weng Tan, Hung-I Shu, Yu-Chun Chiu, Heng-Chang Hsieh
Life of this patent
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Abstract
The present invention provides a shielding apparatus installed over a machine in a clean room to protect the machine. The shielding apparatus comprises at least two supporting beams, and a plurality of rectangular-shaped plate flaps in parallel to each other. The flaps are connected to the supporting beams at an angle, and each flap has areas overlapping with its neighboring flap along a vertical cross-section. Each flap is an anti-acid zinc-plated steel plate with a drain piping connected its bottom to collect and deliver processing liquids.
Claims20
A shielding apparatus installed in a clean room, a machine is positioned in the clean room, the shielding apparatus comprising:
- at least two supporting beams positioned above the machine in the clean room;
- and
- a plurality of flaps connected to the supporting beams, with the top of each flap positioned above the bottom of the neighboring flap.
A shielding apparatus installed in a clean room, used to protect a machine, the shielding apparatus comprising:
- at least two supporting beams positioned above the machine in the clean room;
- a plurality of flaps connected to the supporting beams, each flap comprising a gutter on its bottom, and a top positioned above the gutter of the neighboring flap;
- and
- a drain piping positioned below the corresponding corner of each flap, to deliver liquids collected by the gutters to an exit.
Dependencies are inferred from the claim text.