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AssigneeLeica Microsystems Wetzlar GmbH
InventorUlrich Kaczynski
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An apparatus for fine positioning of a component has a symmetrical, one-piece double parallel spring element having a movable center bar, suspended on bending points, which carries the component. The center bar is preloaded in the direction of the frame by way of an elastic element. The center bar can be adjusted in almost ideally tilt-free fashion with a fine adjustment element arranged between the center bar and frame. A high-precision coordinate measuring instrument having a measurement stage for receiving a substrate that is to be measured, an incident-light and/or transmitted-light illumination device, and an imaging optical system with a vertical optical axis, has a fine positioning apparatus of this kind with a vertically arranged double parallel spring element. Mounted on its center bar is an objective holder, and thereon the objective with an objective axis parallel to the movement direction of the center bar.
An apparatus for fine positioning of a component comprises:
A coordinate measuring instrument for determining the position, relative to a reference point, of patterns (36) on a transparent substrate (35) comprises:
A coordinate measuring instrument for determining the position, relative to a reference point, of patterns (36) on a transparent substrate (35) comprises:
A coordinate measuring instrument for determining the position, relative to a reference point, of patterns (36) on a transparent substrate (35) comprises:
Dependencies are inferred from the claim text.