Method of manufacturing an interconnector
AssigneeTokyo Electron Limited
InventorJunichi Hagihara
Life of this patent
Estimating the term…
Abstract
A method of manufacturing an interconnector that is interposed between a pair of terminal plates each having electrodes arranged in a predetermined pattern, for electrically connecting the electrodes of the terminal plates, including arranging positioning plates in a container and inserting conductive wires into through holes of the positioning plates. Then forming a stacked body by alternately forming stacked insulating sheet layers and synthetic resin layers, in the container and thereafter cutting the stacked body at a middle portion of each synthetic resin layer before separating the synthetic resin layers from the insulating sheet layers, thereby forming interconnectors.
Claims10
A method of manufacturing an interconnector to be interposed between a pair of terminal plates each having a plurality of electrodes arranged in a predetermined arrangement pattern, for electrically connecting corresponding electrodes of the terminal plates, comprising the steps of:
- arranging, in a container, two positioning plates that have a plurality of through holes arranged in a pattern corresponding to the predetermined arrangement pattern of the plurality of electrodes, the two positioning plates being separated from each other;
- inserting conductive wires into the respective through holes of the two positioning plates;
- forming, in the container, a stacked body in which a plurality of insulating sheet layers and a plurality of separable synthetic resin layers are alternately stacked and the conductive wires are formed integral with each of the insulating sheet layers by alternately repeating a step of supplying and solidifying material for forming each of the plurality of insulating sheet layers and a step of supplying and solidifying material for forming each of the plurality of separable synthetic layers;
- separating the stacked body from the container;
- cutting the stacked body at a predetermined portion of each of the synthetic resin layers in parallel with the insulating sheet layers;
- and
- separating the cut synthetic resin layers from the insulating sheet layers.
A method of manufacturing an interconnector to be interposed between a pair of terminal plates each having a plurality of electrodes arranged in a predetermined arrangement pattern, for electrically connecting corresponding electrodes of the terminal plates, comprising the steps of:
- arranging, in a container, two positioning plates that have a plurality of through holes arranged in a pattern corresponding to the predetermined arrangement pattern of the plurality of electrodes, the two positioning plates being separated from each other;
- inserting conductive wires into the respective through holes of the two positioning plates;
- forming, in the container, one stacked body in which at least two insulating sheet layers and at least two seperable synthetic resin layers are alternatively stacked, the conductive wires being formed integral with the insulating sheet layer by alternately repeating a step of supplying and solidifying material for forming each of the plurality of insulating sheet layers and a step of supplying and solidifying material for forming each of the plurality of separable synthetic layers;
- separating the stacked body from the container and the positioning plates;
- and
- separating the synthetic resin layer from the insulating sheet layer.
A method of manufacturing an interconnector to be interposed between a pair of terminal plates each having a plurality of electrodes arranged in a predetermined arrangement pattern, for electrically connecting corresponding electrodes of the terminal plates comprising the steps of:
- arranging, in a container, two positioning plates that have a plurality of through holes arranged in a pattern corresponding to the predetermined arrangement pattern of the plurality of electrodes, the two positioning plates being separated from each other;
- inserting conductive wires into the respective through holes of the two positioning plates;
- forming, in the container, a stacked body in which a plurality of insulating sheet layers and a plurality of separable synthetic resin layers are alternately stacked and the conductive wires are formed integral with each of the insulating sheet layers by alternately repeating a step of supplying and solidifying material for forming each of the plurality of insulating sheet layers and a step of supplying and solidifying material for forming each of the plurality of separable synthetic layers.
A method of manufacturing an interconnector to be interposed between a pair of terminal plates each having a plurality of electrodes arranged m a predetermined arrangement pattern, for electrically connecting corresponding electrodes of the terminal plates, comprising the steps of:
- arranging, in a container, two positioning plates that have a plurality of through holes arranged in a pattern corresponding to the predetermined arrangement pattern of the plurality of electrodes, the two positioning plates being separated from each other;
- inserting conductive wires into the respective through holes of the two positioning plates;
- forming, in the container, a stacked body in which a plurality of insulating sheet layers and a plurality of separable synthetic resin layers are alternately stacked and the conductive wires are formed integral with each of the insulating sheet layers by alternately repeating a step of supplying and solidifying material for forming each of the plurality of insulating sheet layers and a step of supplying and solidifying material for forming each of the plurality of separable synthetic layers;
- separating the stacked body from the container,
- cutting the stacked body at a predetermined portion of each of the synthetic resin layers in parallel with the insulating sheet layers.
Dependencies are inferred from the claim text.